设备详细介绍

高分辨率场发射扫描电镜

High Resolution Field Emission Scanning Electron Microscopy

发布时间:2013-01-25 | 【打印】 【关闭】

 

  型   号:NOVA NanoSEM 430

  功   能:

  • 导电和非导电样品的高分辨率形貌观察,并可背散射电子成像
    Morphological observation for conducting and insulating samples with high resolution, and imaging using back-scattered electrons
  • 配备Oxford X-Max 80能谱仪,可检测成分、探测成分分布
    Detection and mapping of elements in samples with the Oxford X-Max 80 energy dispersive spectrometer (EDS) equipped

  主要指标:

  • 分辨率(Resolution) 1.0 nm @ 15 kV;  1.6 nm @ 1.0 kV
  • 观察范围(Viewfield)100 mm ×100 mm
  • 样品台倾角(Tilting angles)-5° ~ + 70°
  • 配备能谱仪(EDS)超大面积电制冷硅飘逸探测器 (Si drift detector with 80 mm2 super ATW window electrically cooled )
  • 能谱分辨率(Energy resolution):≦129 eV(Mn, 40000 cps)

  技术特点:

  • 高分辨率
    High resolution
  • 非导电样品形貌观察
    Morphological observation of non-conducting materials
  • 形貌观察和成分分析可结合
    Combined analysis of morphology and element mapping