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作者: | Jiang, P | ||||||||
刊物名称: | APPLIED SURFACE SCIENCE | ||||||||
所属学科: | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter | ||||||||
论文题目英文: | Pattern design in large area using octadecyltrichlorosilane self-assembled monolayers as resist material | ||||||||
年: | 2006 | ||||||||
卷: | 252 | ||||||||
期: | 12 | ||||||||
页: | 4230 | ||||||||
联系作者: | Jiang, P | ||||||||
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参与作者: | Jiang, P.Li, SY.Sugimura, H.Takai, O | ||||||||
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